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data sheet keysight b1500a semiconductor device analyzer
introduction keysight b1500a semiconductor device analyzer of precision current-voltage analyzer series is an all in one analyzer supporting iv, cv, pulse/dynamic iv and more, which is designed for all-round characterization from basic to cutting-edge applications. it provides a wide range of measurement capabilities to cover the electrical characterization and evaluation of devices, mate - rials, semiconductors, active/passive components, or virtually any other type of electronic device with uncompromised measurement reliability and effciency. in addition, the b1500as modular architecture with ten available slots allows you to add or upgrade measurement modules if your measurement needs change over time. keysight easyexpert group+ gui based characterization software is available either on the b1500as embedded windows 7 platform with 15-inch touch screen or on your pc to accelerate the characterization tasks. it supports effcient and repeatable device characterization in the entire characterization process from measurement setup and execution to analysis and data management either interactive manual operation or automation across a wafer in conjunction with a semiautomatic wafer prober. easyexpert group+ makes it easy to perform complex device characterization imme - diately with hundreds of ready-to-use measurements (application tests) furnished, and allows you the option of storing test condition and measurement data automatically after each measurement in a unique built-in database (workspace), ensuring that valuable information is not lost and that measurements can be repeated at a later date. keysight b1500a provides the complete solution for device characterization with these versatile capabilities.
03 | keysight | b1500a semiconductor device analyzer - data sheet basic features measurement capabilities: current versus voltage (iv) measurement C accurate and precise measurement ranges of 0.1 fa - 1 a and 0.5 v - 200 v C spot and sweep measurement C time sampling measurements (100 s minimum sampling rate) C pulsed measurement with minimum pulse widths of 50 s using the mcsmu or 500 s using the hpsmu, mpsmu, or hrsmu C the asu (atto-sense and switch unit) can be used with the mpsmu, or hrsmu to provide 0.1 fa measurement resolution and smu/aux path switching C two analog-to-digital converter choices (high-resolution adc or high-speed adc) available for each smu type (hpsmu, mpsmu and hrsmu) capacitance measurement C multi-frequency ac impedance measurement supports cv (capacitance versus voltage), c-t (capacitance versus time) and c-f (capacitance versus frequency) measurement C capacitance measurement frequency range of 1 khz to 5 mhz C quasi-static capacitance-voltage (qs-cv) measurement with leakage current compensation C automated switching between iv and cv measurements using either the optional scuu (smu cmu unify unit) and gswu (guard switch unit) or a pair of asus pulsed iv/fast iv/transient iv measurement C provides high speed and high sensitivity measurement capability for ultra-fast iv (current-voltage), pulsed iv and transient iv measurements, including nbti/pbti and rtn (random telegraph signal noise) measurements C arbitrary waveform generation with 10 ns programmable resolution C simultaneous high-speed voltage/current measurement (200 msa/s, 5 ns sampling rate) C smu technology supports pulsed iv measurement without load line effects pulse generation C up to 40 v voltage pulsing and arbitrary waveform generation for non-volatile memory evaluation C single channel two-level and three level pulsing capability b1500a platform: C 15-inch touch screen supports all capabilities of the intuitive gui for convenient device characterization C confgurable and upgradable measurement modules with 10 slots per mainframe C gpib, usb, lan interfaces, and vga video output port
04 | keysight | b1500a semiconductor device analyzer - data sheet measurement capabilities (continued): easyexpert group+ software: C characterization environment is available either on mainframe (embedded windows 7) or on users pc C intuitive gui based operation with keyboard, mouse operation and touch screen. C application test mode provides the furnished hundreds of ready-to-use application tests for quick measurement execution C classic test mode provides easy access to the full capability of instrument features. C graphical display and analysis capabilities facilitate front-end data analysis without additional utilities and support report generation as image data or excel data. C individualized built-in database (workspace) records test data automatically, and simplifes the data management without annoying numerous data fles. C tracer test mode enables a curve tracer like knob control of measurement parameters to support interactive real-time device characterization and automatic data recording feature C oscilloscope view (available for the mcsmu) supports pulsed voltage and current waveform viewing for quick and easy timing verifcation C quick test mode supports test sequencing without programming C gui-based control of the keysight b2200a, b2201a and e5250a switching matrices C gui-based self-test, self-calibration and diagnostics menu for hardware maintenance C easyexpert remote control function supports the remote measurement execution of application tests that are created on gui interactively, via the lan interface C data back capability and various data protection feature for shared usage by multiple users C easyexpert group+ can be installed on as many pcs as you need without additional charge to take advantage of offine personal analyzer environment among users in your department. specifcation conditions the measurement and output accuracy are specifed at the rear panel connector terminals when referenced to the zero check terminal. the b1530a wgfmu measurement and output accuracy are specifed at the output terminal of the rsu. accuracy is specifed under the following conditions: 1. temperature: 23 c 5 c 2. humidity: 20 % to 60 % 3. after 40 minute warm-up followed by self-calibration 4. ambient temperature change less than 1 c after self-calibration execution, not applicable for mfcmu and wgfmu 5. measurement made within one hour after self-calibration execution, not applicable for mfcmu and wgfmu 6. calibration period: 1 year 7. smu integration time setting: 1 plc (1 na to 1a range, voltage range) 20 plc (100 pa range) 50 plc (1 pa to 10 pa range) averaging of high-speed adc: 128 samples per 1 plc 8. smu flter: on (for hpsmu, mpsmu and hrsmu) 9. smu measurement terminal connection: kelvin connection 10. wgfmu load capacitance: 25 pf or less note: this document lists specifcations and supplemental characteristics for the b1500a and its associated modules. the specifcations are the standards against which the b1500a and its associated modules are tested. when the b1500a and any of its associated modules are shipped from the factory, they meet the specifcations. the supplemental characteristics described in the following specifcations are not warranted, but provide useful information about the functions and performance of the instrument. note: keysight is responsible for removing, installing, and replacing the b1500a modules. contact your nearest keysight to install and calibrate the b1500a modules.
05 | keysight | b1500a semiconductor device analyzer - data sheet b1500a mainframe specifcations supported plug-in modules the b1500a supports ten slots for plug-in modules. module name slots occupied key features B1510A high power source/monitor unit (hpsmu) 2 C range up to 200 v/1 a with 4-quadrant operation C minimum measurement resolution 10 fa/2 v C spot, sweep and more measurement capabilities C sampling (time domain) measurement from 100 s C pulse measurement from 500 s pulse width C accurate quasi-static capacitance voltage (qs-cv) measurement with leakage current compensation b1511b medium power source/monitor unit (mpsmu) 1 C range up to 100 v/0.1 a with 4-quadrant operation C minimum measurement resolution 10 fa/0.5 v C optional asu (atto-sense and switch unit) for 100 C aaresolution and iv/cv switching capability b1517a high resolution source/monitor unit (hrsmu) 1 C range up to 100 v/0.1 a with 4-quadrant operation C minimum measurement resolution 1 fa/0.5 v C optional asu (atto-sense and switch unit) for 100 C aaresolution and iv/cv switching capability b1514a 50 s pulse medium current source/ monitor unit (50 s pulse mcsmu) 1 C range up to 30 v/1 a pulsed (0.1 a dc) with 4-quadrant operation C pulse measurement from 50 s pulse width with 2 s resolution C oscilloscope view (voltage/current waveform viewer) is supported C minimum measurement resolution 10 pa/0.2 v b1520a multi-frequency capacitance measure - ment unit (mfcmu) 1 C ac impedance measurement (c-v, c-f, c-t) C 1 khz to 5 mhz frequency range with minimum 1 mhz frequency resolution C 25 v built-in dc bias and 100 v dc bias with smu and scuu (smu cmu unify unit) C easy and fast yet accurate iv and cv automated connection change by scuu b1525a high voltage semiconductor pulse generator unit (hv-spgu) 1 C high voltage output up to 40 v applicable for non-volatile memory testing C two-level and three-level pulse capability by single channel C flexible arbitrary waveform generation with 10 ns resolution (arbitrary linear waveform generation function) C two channels per module b1530a waveform generator/fast measure - ment unit (wgfmu) 1 C ultra-fast iv measurement capability for the pulsed iv and transient iv such as nbti/pbti, rtn, etc. C waveform generation with 10 ns programmable resolution C simultaneous high-speed iv measurement capability (200 msa/s, 5 ns sampling rate) 10v peak-to-peak output C no load line effect accurate pulsed iv measurement by dynamic smu technology
06 | keysight | b1500a semiconductor device analyzer - data sheet maximum module confguration the total power consumption of all smu modules cannot exceed 84 w. under this rule, the b1500a can contain any combination of the following smus: C up to 10 mpsmus C up to 10 hrsmus C up to 4 hpsmus C up to 4 mcsmus only one single-slot mfcmu can be installed per b1500a mainframe. up to fve single-slot hv-spgus can be installed per mainframe. up to fve single-slot wgfmus can be installed per mainframe. when one or more wgfmu modules are installed in the b1500a mainframe, the following table applies. multiply the values given below by the number of installed modules of that type and add the products together. the sum of the products must be less than or equal to 59 for the confguration to be permissible. mpsmu 2 hrsmu 2 hpsmu 14 mcsmu 5 mfcmu 7 hv-spgu 12 wgfmu 10 maximum voltage between common and ground 42 v ground unit (gndu) specifcation the gndu is furnished standard with the b1500a mainframe. output voltage: 0 v 100 v maximum sink current: 4.2 a output terminal/connection: triaxial connector, kelvin (remote sensing) gndu supplemental characteristics load capacitance: 1 f cable resistance: C for i s 1.6 a: force line r < 1 ? C for 1.6 a < i s 2.0 a: force line r < 0.7 ? C for 2.0 a < i s 4.2 a: force line r < 0.35 ? C for all cases: sense line r 10 ? C where i s is the current being sunk by the gndu. peripherals and interface data storage hard disk drive, dvd-r drive interfaces gpib, interlock, usb (usb 2.0, front 2, rear 2), l an (1000base-t/100base-t x /10base-t), trigger in/out, digital i/o, vga video output remote control capabilities C flex commands (gpib) C easyexpert remote control function (lan) trigger i/o C only available using gpib flex commands. C trigger in/out synchronization pulses before and after setting and measuring dc voltage and current. arbitrary trigger events can be masked or activated independently. furnished accessories C keyboard C mouse C stylus pen C power cable C manual cd-rom C easyexpert cd-rom C software cd-rom (including vxi plug&play driver and utility tools) C software entitlement document for easyexpert furnished software C easyexpert group+ C vxi plug&play driver for the b1500a C mdm fle converter this tool can convert the easyexpert fle (xtr/ztr) to keysight ic-cap mdm fle format. the easyexpert fle of the following measurements performed in the classic mode is only supported: C iv sweep C multi channel iv sweep C cv sweep C 4155/56 setup fle converter tool this tool can convert 4155 and 4156 measurement setup fles (fle extensions mes or dat) into equivalent easyexpert classic test mode setup fles.
07 | keysight | b1500a semiconductor device analyzer - data sheet mpsmu and hrsmu module specifcations voltage range, resolution, and accuracy (high resolution adc) voltage range force resolution measure resolution force accuracy1 measure accuracy1 maximum current 0.5 v 25 v 0.5 v (0.018 % + 150 v) (0.01 % + 120 v) 100 ma 2 v 100 v 2 v (0.018 % + 400 v) (0.01 % + 140 v) 100 ma 5 v 250 v 5 v (0.018 % + 750 v) (0.009 % + 250 v) 100 ma 20 v 1 mv 20 v (0.018 % + 3 mv) (0.009 % + 900 v) 100 ma 40 v 2 mv 40 v (0.018 % + 6 mv) (0.01 % + 1 mv) 2 100 v 5 mv 100 v (0.018 % + 15 mv) (0.012 % + 2.5 mv) 2 1. (% of read value + offset voltage v) 2. 100 ma (vo 20 v), 50 ma (20 v < vo 40 v), 20 ma (40 v < vo 100 v), vo is the output voltage in volts. current range, resolution, and accuracy (high resolution adc) smu type current range force resolution measure resolution1 , 2 force accuracy3 measure accuracy3 maximum voltage mpsmu w/ asu hrsmu w/ asu 1 pa 1 fa 100 aa (0.9 %+15 fa) (0.9 %+12 fa) 100 v hrsmu 10 pa 5 fa 400 aa (with asu) 1 fa (hrsmu) (0.46 %+30 fa+10 aa x vo) (0.46 %+15 fa+10 aa x vo) 100 v 100 pa 5 fa 500 aa (with asu) 2 fa (hrsmu) (0.3 %+100 fa+100 aa x vo) (0.3 %+30 fa+100 aa x vo) 100 v mpsmu 1 na 50 fa 10 fa (0.1 %+300 fa+1 fa x vo) (0.1 %+200 fa+1 fa x vo) 100 v 10 na 500 fa 10 fa (0.1 %+3 pa+10 fa x vo) (0.1 %+1 pa+10 fa x vo) 100 v 100 na 5 pa 100 fa (0.05 %+30 pa+100 fa x vo) (0.05 %+20 pa+100 fa x vo) 100 v 1 a 50 pa 1 pa (0.05 %+300 pa+1 pa x vo) (0.05 %+100 pa+1 pa x vo) 100 v 10 a 500 pa 10 pa (0.05 %+3 na+10 pa x vo) (0.04 %+2 na+10 pa x vo) 100 v 100 a 5 na 100 pa (0.035 %+15 na+100 pa x vo) (0.03 %+3 na+100 pa x vo) 100 v 1 ma 50 na 1 na (0.04 %+150 na+1 na x vo) (0.03 %+60 na+1 na x vo) 100 v 10 ma 500 na 10 na (0.04 %+1.5 a+10 na x vo) (0.03 %+200 na+10 na x vo) 100 v 100 ma 5 a 100 na (0.045 %+15 a+100 na x vo) (0.04 %+6 a+100 na x vo) 4 1. specifed measurement resolution is limited by fundamental noise limits. minimum displayed resolution is 1 aa at 1 pa range by 6 digits. 2. measurements made in the lower ranges can be greatly impacted by vibrations and shocks. these specifcations assume an environment free of these factors. 3. (% of read value + offset current (fxed part determined by the output/measurement range + proportional part that is multiplied by vo)) 4. 100 v (io 20 ma), 40 v (20 ma < io 50 ma), 20 v (50 ma < io 100 ma), io is the output current in amps.
08 | keysight | b1500a semiconductor device analyzer - data sheet power consumption voltage source mode voltage range power 0.5 v 20 x ic (w) 2 v 20 x ic (w) 5 v 20 x ic (w) 20 v 20 x ic (w) 40 v 40 x ic (w) 100 v 100 x ic (w) where ic is the current compliance setting. current source mode voltage compliance power vc 20 20 x io (w) 20 < vc 40 40 x io (w) 40 < vc 100 100 x io (w) where vc is the voltage compliance setting and io is output current. voltage range, resolution, and accuracy (high speed adc) voltage range force resolution measure resolution force accuracy1 measure accuracy1 maximum current 0.5 v 25 v 25 v (0.018 % + 150 v) (0.01 % + 250 v) 100 ma 2 v 100 v 100 v (0.018 % + 400 v) (0.01 % + 700 v) 100 ma 5 v 250 v 250 v (0.018 % + 750 v) (0.01 % + 2 mv) 100 ma 20 v 1 mv 1 mv (0.018 % + 3 mv) (0.01 % + 4 mv) 100 ma 40 v 2 mv 2 mv (0.018 % + 6 mv) (0.015 % + 8 mv) 2 100 v 5 mv 5 mv (0.018 % + 15 mv) (0.02 % + 20 mv) 2 1. (% of read value + offset voltage v) 2. 100 ma (vo 20 v), 50 ma (20 v < vo 40 v), 20 ma (40 v < vo 100 v), vo is the output voltage in volts. current range, resolution, and accuracy (high speed adc) smu type current range force resolution measure resolution1 , 2 force accuracy3 measure accuracy3 maximum voltage mpsmu w/asu hrsmu w/asu 1 pa 1 fa 100 aa (0.9 %+15 fa) (1.8 %+12 fa) 100 v hrsmu 10 pa 5 fa 1 fa (0.46 %+30 fa+10 aa x vo) (0.5 %+15 fa+10 aa x vo) 100 v 100 pa 5 fa 5 fa (0.3 %+100 fa+100 aa x vo) (0.5 %+40 fa+100 aa x vo) 100 v mpsmu 1 na 50 fa 50 fa (0.1 %+300 fa+1 fa x vo) (0.25 %+300 fa+1 fa x vo) 100 v 10 na 500 fa 500 fa (0.1 %+3 pa+10 fa x vo) (0.25 %+2 pa+10 fa x vo) 100 v 100 na 5 pa 5 pa (0.05 %+30 pa+100 fa x vo) (0.1 %+20 pa+100 fa x vo) 100 v 1 a 50 pa 50 pa (0.05 %+300 pa+1 pa x vo) (0.1 %+200 pa+1 pa x vo) 100 v 10 a 500 pa 500 pa (0.05 %+3 na+10 pa x vo) (0.05 %+2 na+10 pa x vo) 100 v 100 a 5 na 5 na (0.035 %+15 na+100 pa x vo) (0.05 %+20 na+100 pa x vo) 100 v 1 ma 50 na 50 na (0.04 %+150 na+1 na x vo) (0.04 %+200 na+1 na x vo) 100 v 10 ma 500 na 500 na (0.04 %+1.5 a+10 na x vo) (0.04 %+2 a+10 na x vo) 100 v 100 ma 5 a 5 a (0.045 %+15 a+100 na x vo) (0.1 %+20 a+100 na x vo) 4 1. specifed measurement resolution is limited by fundamental noise limits. minimum displayed resolution is 1 aa at 1 pa range by 6 digits. 2. measurements made in the lower ranges can be greatly impacted by vibrations and shocks. these specifcations assume an environment free of these factors. 3. (% of read value + offset current (fxed part determined by the output/measurement range + proportional part that is multiplied by vo)) 4. 100 v (io 20 ma), 40 v (20 ma < io 50 ma), 20 v (50 ma < io 100 ma), io is the output current in amps. 100 50 20 -20 -50 -100 -100 -40 -20 20 40 100 curr ent (ma) vo ltage (v) hpsmu and hrsmu measur ement and output rang e mpsmu and hrsmu measurement and output range
09 | keysight | b1500a semiconductor device analyzer - data sheet voltage range, resolution, and accuracy (high speed adc) voltage range force resolution measure resolution force accuracy 1 measure accuracy 1 maximum current 2 v 100 v 100 v (0.018 % + 400 v) (0.01 % + 700 v) 1 a 20 v 1 mv 1 mv (0.018 % + 3 mv) (0.01 % + 4 mv) 1 a 40 v 2 mv 2 mv (0.018 % + 6 mv) (0.015 % + 8 mv) 500 ma 100 v 5 mv 5 mv (0.018 % + 15 mv) (0.02 % + 20 mv) 125 ma 200 v 10 mv 10 mv (0.018 % + 30 mv) (0.035 % + 40 mv) 50 ma 1. (% of read value + offset voltage v) hpsmu module specifcations voltage range, resolution, and accuracy (high resolution adc) voltage range force resolution measure resolution force accuracy 1 measure accuracy 1 maximum current 2 v 100 v 2 v (0.018 % + 400 v) (0.01 % + 140 v) 1 a 20 v 1 mv 20 v (0.018 % + 3 mv) (0.009 % + 900 v) 1 a 40 v 2 mv 40 v (0.018 % + 6 mv) (0.01 % + 1 mv) 500 ma 100 v 5 mv 100 v (0.018 % + 15 mv) (0.012 % + 2.5 mv) 125 ma 200 v 10 mv 200 v (0.018 % + 30 mv) (0.014 % + 2.8 mv) 50 ma 1. (% of read value + offset voltage v) current range, resolution, and accuracy (high resolution adc) current range force resolution measure resolution 1 force accuracy 2 measure accuracy 2 maximum voltage 1 na 50 fa 10 fa (0.1 %+300 fa+1 fa x vo) (0.1 %+200 fa+1 fa x vo) 200 v 10 na 500 fa 10 fa (0.1 %+3 pa+10 fa x vo) (0.1 %+1 pa+10 fa x vo) 200 v 100 na 5 pa 100 fa (0.05 %+30 pa+100 fa x vo) (0.05 %+20 pa+100 fa x vo) 200 v 1 a 50 pa 1 pa (0.05 %+300 pa+1 pa x vo) (0.05 %+100 pa+1 pa x vo) 200 v 10 a 500 pa 10 pa (0.05 %+3 na+10 pa x vo) (0.04 %+2 na+10 pa x vo) 200 v 100 a 5 na 100 pa (0.035 %+15 na+100 pa x vo) (0.03 %+3 na+100 pa x vo) 200 v 1 ma 50 na 1 na (0.04 %+150 na+1 na x vo) (0.03 %+60 na+1 na x vo) 200 v 10 ma 500 na 10 na (0.04 %+1.5 a+10 na x vo) (0.03 %+200 n a+10 na x vo) 200 v 100 ma 5 a 100 na (0.045 %+15 a+100 na x vo) (0.04 %+6 a+100 na x vo) 3 1 a 50 a 1 a (0.4 %+300 a+1 a x vo) (0.4 %+150 a+1 a x vo) 3 1. specifed measurement resolution is limited by fundamental noise limits. 2. (% of read value + offset current (fxed part determined by the output/measurement range + proportional part that is multiplied by vo)) 3. 200 v (io 50 ma), 100 v (50 ma < io 125 ma), 40 v (125 ma < io 500 ma), 20 v (500 ma < io 1 a), io is the output current in amps.
10 | keysight | b1500a semiconductor device analyzer - data sheet 1000 500 125 50 -50 -125 -500 -1000 -200 -100 -40 -20 20 40 100 200 curr ent (ma) v oltage (v) hpsmu measur ement and output rang e hpsmu measurement and output range power consumption voltage source mode voltage range power 2 v 20 x ic (w) 20 v 20 x ic (w) 40 v 40 x ic (w) 100 v 100 x ic (w) 200 v 200 x ic (w) where ic is the current compliance setting. current source mode voltage compliance power vc 20 20 x io (w) 20 < vc 40 40 x io (w) 40 < vc 100 100 x io (w) 100 < vc 200 200 x io (w) where vc is the voltage compliance setting and io is output current. current range, resolution, and accuracy (high speed adc) current range force resolution measure resolution1 force accuracy2 measure accuracy2 maximum voltage 1 na 50 fa 50 fa (0.1 %+300 fa+1 fa x vo) (0.25 %+300 fa+1 fa x vo) 200 v 10 na 500 fa 500 fa (0.1 %+3 pa+10 fa x vo) (0.25 %+2 pa+10 fa x vo) 200 v 100 na 5 pa 5 pa (0.05 %+30 pa+100 fa x vo) (0.1 %+20 pa+100 fa x vo) 200 v 1 a 50 pa 50 pa (0.05 %+300 pa+1 pa x vo) (0.1 %+200 pa+1 pa x vo) 200 v 10 a 500 pa 500 pa (0.05 %+3 na+10 pa x vo) (0.05 %+2 na+10 pa x vo) 200 v 100 a 5 na 5 na (0.035 %+15 na+100 pa x vo) (0.05 %+20 na+100 pa x vo) 200 v 1 ma 50 na 50 na (0.04 %+150 na+1 na x vo) (0.04 %+200 na+1 na x vo) 200 v 10 ma 500 na 500 na (0.04 %+1.5 a+10 na x vo) (0.04 %+2 a+10 na x vo) 200 v 100 ma 5 a 5 na (0.045 %+15 a+100 na x vo) (0.1 %+20 a+100 na x vo) 3 1 a 50 a 50 a (0.4 %+300 a+1 a x vo) (0.5 %+300 a+1 a x vo) 3 1. specifed measurement resolution is limited by fundamental noise limits. 2. (% of read value + offset current (fxed part determined by the output/measurement range + proportional part that is multiplied by vo)) 3. 200 v (io 50 ma), 100 v (50 ma < io 125 ma), 40 v (125 ma < io 500 ma), 20 v (500 ma < io 1 a), io is the output current in amps.
11 | keysight | b1500a semiconductor device analyzer - data sheet mcsmu module specifcations voltage range, resolution, and accuracy voltage range force resolution measure resolution force accuracy 1 (% + mv) measure accuracy 1 (% + mv) maximum current 0.2 v 200 nv 200 nv (0.06 + 0.14) (0.06 + 0.14) 1 a 2 v 2 v 2 v (0.06 + 0.6) (0.06 + 0.6) 1 a 20 v 20 v 20 v (0.06 + 3) (0.06 + 3) 1 a 40 v 2 40 v 40 v (0.06 + 3) (0.06 + 3) 1 a 1. (% of reading value + fxed offset in mv). 2. maximum output voltage is 30 v. current range, resolution, and accuracy current range force resolution measure resolution force accuracy 1 (% + a + a) measure accuracy 1 (% + a + a) maximum voltage 10 a 10 pa 10 pa (0.06 + 2e-9 + vo x 1e-10) (0.06 + 2e-9 + vo x 1e-10) 30 v 100 a 100 pa 100 pa (0.06 + 2e-8 + vo x 1e-9) (0.06 + 2e-8 + vo x 1e-9) 30 v 1 ma 1 na 1 na (0.06 + 2e-7 + vo x 1e-8) (0.06 + 2e-7 + vo x 1e-8) 30 v 10 ma 10 na 10 na (0.06 + 2e-6 + vo x 1e-7) (0.06 + 2e-6 + vo x 1e-7) 30 v 100 ma 100 na 100 na (0.06 + 2e-5 + vo x 1e-6) (0.06 + 2e-5 + vo x 1e-6) 30 v 1 a 2 1 a 1 a (0.4 + 2e-4 + vo x 1e-5) (0.4 + 2e-4 + vo x 1e-5) 30 v 1. (% of reading value + fxed offset in a + proportional offset in a), vo is the output voltage in v. 2. pulse mode only. the maximum value of the base current during pulsing is 50 ma. power consumption voltage source mode: voltage range power 0.2 v 40 x ic (w) 2 v 40 x ic (w) 40 v 40 x ic (w) where ic is the current compliance setting. current source mode: voltage compliance power vc 0.2 40 x io (w) 0.2 < vc 2 40 x io (w) 2 < vc 40 40 x io (w) where vc is the voltage compliance setting and io is output current. mcsmu measurement and output range pulse only dc and pulse 30 - 30 0.1 - 0.1 1 - 1 current (a) voltage (v) pulse only dc and pulse
12 | keysight | b1500a semiconductor device analyzer - data sheet output terminal/connection dual triaxial connector, kelvin (remote sensing) voltage/current compliance (limiting) the smu can limit output voltage or current to prevent damaging the device under test. voltage: 0 v to 100 v (mpsmu, hrsmu) 0 v to 200 v (hpsmu) 0 v to 30 v (mcsmu) current: 10 fa to 100 ma (hrsmu/mpsmu with asu) 100 fa to 100 ma (hrsmu) 1 pa to 100 ma (mpsmu) 1 pa to 1 a (hpsmu) 10 na to 1 a (mcsmu) compliance accuracy: same as the current or voltage set accuracy. about measurement accuracy rf electromagnetic feld and smu measurement accuracy: smu voltage and current measurement accuracy can be affected by rf electro-magnetic feld strengths greater than 3 v/m in the frequency range of 80 mhz to 1 ghz. the extent of this effect depends upon how the instrument is positioned and shielded. induced rf feld noise and smu measurement accuracy: smu voltage and current measurement accuracy can be affected by induced rf feld noise strengths greater than 3 vrms in the frequency range of 150 khz to 80 mhz. the extent of this effect depends upon how the instrument is positioned and shielded. pulse measurement programmable pulse width, period and delay: for hpsmu, mpsmu, and hrsmu pulse width: 500 s to 2 s pulse period: 5 ms to 5 s period width + 2 ms (when width 100 ms) period width + 10 ms (when width > 100 ms) pulse resolution: 100 s pulse delay: 0 s for mcsmu pulse width: 10 s* to 100 ms (1 a range) 10 s* to 2 s (10 a to 100 ma range) pulse width resolution: 2 s pulse period: 5 ms to 5 s pulse period resolution: 100 s pulse duty: for 1 a range: 5% for 10 a to 100m a range period delay + width + 2 ms (when delay + width 100 ms) period delay + width + 10 ms (when delay + width > 100 ms) pulse delay: 0 s to (periodCwidth) * recommended pulse width 50 s time to reach within 1% of the fnal value at resistive load >50 , 10 v step voltage, 1 a compliance (supplemental characteristics)
13 | keysight | b1500a semiconductor device analyzer - data sheet supplemental characteristics current compliance setting accuracy (for opposite polarity): for hpsmu, mpsmu, and hrsmu: for 1 pa to 10 na ranges: (setting accuracy + 12 % of range) for 100 na to 1 a ranges: (setting accuracy + 2.5 % of range) for mcsmu: (setting accuracy + 2.5 % of range) smu pulse setting accuracy (fxed measurement range): for hpsmu, mpsmu, and hrsmu: width: 0.5% 50 s period: 0.5% 100 s for mcsmu: width: 0.1% 2 s period: 0.1% 100 s minimum pulse measurement time: 16 s (hpsmu, mpsmu, and hrsmu) 2 s (mcsmu) voltage source output resistance: (force line, non-kelvin connection) 0.2 (hpsmu) 0.3 (mpsmu, hrsmu) voltage measurement input resistance: 10 13 (hpsmu, mpsmu, and hrsmu) 10 9 (mcsmu, 1 a) current source output resistance: 10 13 (hpsmu, mpsmu, and hrsmu) 10 9 (mcsmu, 1 a) maximum allowable cable resistance: (kelvin connection) for hpsmu, mpsmu, and hrsmu: sense: 10 force: 10 ( 100 ma),1.5 (>100 ma) for mcsmu sense: 10 force : 1 between high and low maximum allowable inductance: force 3 h with low force as shield (mcsmu) maximum load capacitance: for hpsmu, mpsmu, and hrsmu: 1 pa to 10 na ranges: 1000 pf 100 na to 10 ma ranges: 10 nf 100 ma and 1 a ranges: 100 f for mcsmu: 10 a to 10 ma range : 12 nf 100 ma to 1 a range : 100 f maximum guard capacitance: 900 pf (hpsmu, mpsmu, and hrsmu) 660 pf (hrsmu/mpsmu with asu) maximum shield capacitance: 5000 pf (hpsmu, mpsmu, and hrsmu) 3500 pf (hrsmu/mpsmu with asu) noise characteristics: for hpsmu, mpsmu, and hrsmu (flter on) voltage source: 0.01% of v range (rms.) current source: 0.1% of i range (rms.) for mcsmu voltage/current source: 200 mv (0 to peak) max overshoot (flter on): for hpsmu mpsmu, and hrsmu voltage source: 0.03% of v range current source: 1% of i range for mcsmu voltage/current source: 10% of range range switching transient noise: for hpsmu, mpsmu, and hrsmu (flter on): voltage ranging: 250 mv current ranging: 70 mv for mcsmu: voltage ranging: 250 mv current ranging: 70 mv maximum guard offset voltage: 1 mv (hpsmu) 3 mv (mpsmu, hrsmu) 4.2 mv (hrsmu/mpsmu with asu, iout100 a) maximum slew rate: 0.2 v/s (hpsmu, mpsmu, and hrsmu) 1 v/s (mcsmu) maximum dc foating voltage: 200 v dc between low force and common (mcsmu)
14 | keysight | b1500a semiconductor device analyzer - data sheet mfcmu (multi frequency capacitance measurement unit) module specifcations measurement functions measurement parameters: cp-g, cp-d, cp-q, cp-rp, cs-rs, cs-d, cs-q, lp-g, lp-d, lp- q, lp-rp, ls-rs, ls-d, ls-q, r-x, g-b, z- q , y- q ranging: auto and fxed measurement terminal: four-terminal pair confguration, four bnc (female) connectors cable length: 1.5 m or 3 m, automatic identifcation of accessories test signal frequency: range: 1 khz to 5 mhz resolution: 1 mhz (minimum) accuracy: 0.008 % output signal level: range: 10 mv rms to 250 mv rms resolution: 1 mv rms accuracy: (10.0 % + 1 mv rms ) at the measurement port of the mfcmu (15.0 % + 1 mv rms ) at the measurement port of the mfcmu cable (1.5 m or 3.0 m) output impedance: 50 ?, typical signal level monitor: range: 10 mv rms to 250 mv rms accuracy (open load): (10.0 % of reading + 1 mv rms ) at the measurement port of the mfcmu (15.0 % of reading + 1 mv rms ) at the measurement port of the mfcmu cable (1.5 m or 3 m) dc bias function dc bias: range: 0 to 25 v resolution: 1 mv accuracy: (0.5 % + 5.0 mv) at the measurement port of the mfcmu or the mfcmu cable (1.5 m or 3.0 m) maximum dc bias current (supplemental characteristics) impedance range maximum dc bias current 50 ? 10 ma 100 ? 10 ma 300 ? 10 ma 1 k? 1 ma 3 k? 1 ma 10 k? 100 a 30 k? 100 a 100 k? 10 a 300 k? 10 a output impedance: 50 ?, typical dc bias monitor: range: 0 to 25 v accuracy (open load): (0.2 % of reading + 10.0 mv) at the measurement port of the mfcmu or the mfcmu cable (1.5 m or 3.0 m) sweep characteristics available sweep parameters: oscillator level, dc bias voltage, frequency sweep type: linear, log sweep mode: single, double sweep direction: up, down number of measurement points: maximum 1001 points
15 | keysight | b1500a semiconductor device analyzer - data sheet measurement accuracy the following parameters are used to express the impedance measurement accuracy at the measurement port of the mfcmu or the mfcmu cable (1.5 m or 3.0 m). z x : impedance measurement value (?) d x : measurement value of d e = e p + (z s / | z x | + y o |z x |) x 100 (%) e p = e pl + e posc + e p (%) y o = y ol + y osc + y o (s) z s = z sl + z osc + z s (?) |z| accuracy e (%) q accuracy e/100 (rad) c accuracy at d x 0.1 e (%) at d x > 0.1 e x (1 + d x 2 ) (%) d accuracy at d x 0.1 e/100 at d x > 0.1 e x (1 + d x )/100 g accuracy at d x 0.1 e/ d x (%) at d x > 0.1 e x ? (1 + d x 2 ) /d x (%) note: measurement accuracy is specifed under the following conditions: temperature: 23 c 5 c integration time: 1 plc or 16 plc
16 | keysight | b1500a semiconductor device analyzer - data sheet parameters e posc z osc oscillator level e posc (%) z osc (m?) 125 mv < v osc 250 mv 0.03 x (250/ v osc - 1) 5 x (250/ v osc - 1) 64 mv < v osc 125 mv 0.03 x (125/ v osc - 1) 5 x (125/ v osc - 1) 32 mv < v osc 64 mv 0.03 x (64/ v osc - 1) 5 x (64/ v osc - 1) v osc 32 mv 0.03 x (32/ v osc - 1) 5 x (64/ v osc - 1) v osc is oscillator level in mv. parameters e pl y ol z sl cable length e pl (%) y ol (ns) z sl (m?) 1.5 m 0.02 + 3 x f/100 750 x f/100 5.0 3 m 0.02 + 5 x f/100 1500 x f/100 5.0 f is frequency in mhz. if measurement cable is extended, open compensation, short compensation, and load compensation must be performed. parameters y osc y o e p z s frequency y osc (ns) y o (ns) e p (%) z s (m?) 1 khz f 200 khz 1 x (125/ v osc C 0.5) 1.5 0.095 5.0 200 khz < f 1 mhz 2 x (125/ v osc C 0.5) 3.0 0.095 5.0 1 mhz < f 2 mhz 2 x (125/ v osc C 0.5) 3.0 0.28 5.0 2 mhz < f 20 x (125/ v osc C 0.5) 30.0 0.28 5.0 f is frequency in hz. v osc is oscillator level in mv. example of calculated c/g measurement accuracy frequency measured capacitance c accuracy 1 measured conduc - tance g accuracy 1 5 mhz 1 pf 0.61 % 3 s 192 ns 10 pf 0.32 % 31 s 990 ns 100 pf 0.29 % 314 s 9 s 1 nf 0.32 % 3 ms 99 s 1 mhz 1 pf 0.26 % 628 ns 16 ns 10 pf 0.11 % 6 s 71 ns 100 pf 0.10 % 63 s 624 ns 1 nf 0.10 % 628 s 7 s 100 khz 10 pf 0.18 % 628 ns 11 ns 100 pf 0.11 % 6 s 66 ns 1 nf 0.10 % 63 s 619 ns 10 nf 0.10 % 628 s 7 s 10 khz 100 pf 0.18 % 628 ns 11 ns 1 nf 0.11 % 6 s 66 ns 10 nf 0.10 % 63 s 619 ns 100 nf 0.10 % 628 s 7 s 1 khz 100 pf 0.92 % 63 ns 6 ns 1 nf 0.18 % 628 ns 11 ns 10 nf 0.11 % 6 s 66 ns 100 nf 0.10 % 63 s 619 ns 1. khfdsdfldqfhdqgfrqgxfdqfhphdvxuhphqdffxudflvvshflohgxqghukhiroorzlqjfrqgllrqv d x = 0.1 integration time: 1 plc test signal level: 30 mvrms at four-terminal pair port of mfcmu
17 | keysight | b1500a semiconductor device analyzer - data sheet atto-sense and switch unit (asu) specifcations aux path specifcation maximum voltage 100 v (aux input to aux common) 100 v (aux input to circuit common) 42 v (aux common to circuit common) maximum current 0.5 a (aux input to force output) asu supplemental characteristics band width (at -3 db) 30 mhz (aux port) smu cmu unify unit (scuu) and guard switch unit (gswu) specifcations the scuu multiplexes the outputs from two smus (mpsmus and/or hrsmus) and the cmu. the scuu outputs are two sets of kelvin triaxial ports (force and sense). the scuu also allows the smus to act as dc bias sources in conjunction with the cmu. special cables are available to connect the smus and cmu with the scuu, and an auto-detect feature automatically compen - sates for the cable length going to the scuu. the gswu contains a relay that automatically opens for iv measurements and closes for cv measurements, forming a guard return path to improve cv measurement accuracy. supported smu mpsmu and hrsmu for scuu inputs: triaxial ports: force1, sense1, force2, and sense2 bnc ports: for mfcmu control port: for mfcmu outputs: triaxial ports: force1/cmuh, sense1, force2/cmul, and sense2 control port: for gswu leds: smu/cmu output status indicator docking mode: direct and indirect mode for gswu input: control port: for scuu mini pin plug ports: guard1, guard2 output: led: connection status indicator scuu supplemental characteristics smu path: offset current: < 20 fa offset voltage: < 100 v at 300 sec closed channel residual resistance: < 200 m? channel isolation resistance: > 10 15 ? cmu path: test signal signal output level additional errors (cmu bias, open load): 2 % (direct docking) 7 % (indirect docking) signal output level additional errors (smu bias, open load): 5 % (direct docking, 10 khz) 10 % (indirect docking, 10 khz) output impedance: 50 ?, typical signal level monitor additional errors (open load): 2 % (cmu bias), direct docking 5 % (smu bias), direct docking 7 % (cmu bias), indirect docking 10 % (smu bias), indirect docking dc bias function dc voltage bias (cmu bias): range: 0 to 25 v resolution: 1 mv additional errors (for cmu bias): 100 v (open load) dc voltage bias (smu bias): range: 0 to 100 v resolution: 5 mv additional errors (for smu voltage output accuracy): 100 v (open load) dc bias monitor additional errors (open load): 20 mv, direct docking 30 mv, indirect docking output impedance: 50 ?, typical dc output resistance: 50 ? (cmu bias), 130 ? (smu bias)
18 | keysight | b1500a semiconductor device analyzer - data sheet measurement accuracy impedance measurement error is given by adding the following additional error e e to the mfcmu measurement error. e e = (a + z s /|z x | + y o |z x |) x 100 (%) z x : impedance measurement value (?) a: 0.05 % (direct docking) or 0.1 % (indirect docking) z s : 500 + 500 x f (m?) y o : 1 + 1000 x f/100 (ns) (direct docking, x2 for indirect docking) note: f is frequency in mhz. when the measurement terminals are extended by using the measurement cable, the measurement accuracy is applied to the data measured after performing the open/short/load correction at the dut side cable end. note: the error is specifed under the following conditions: temperature: 23 c 5 c integration time: 1 plc or 16 plc hv-spgu (high voltage semiconductor pulse generator unit) module specifcation specifcations number of output channels: 2 channels per module modes: pulse, constant, and freerun standard pulse mode: C two level pulse C three level pulse per one channel C pulse period: 20 ns to 10 s delay range: 0 s to 9.99 s delay resolution: 2.5 ns (minimum) output count: 1 to 1,000,000 voltage monitor minimum sampling period: 5 s trigger output: level: ttl timing: synchronized with pulse period trigger width: pulse period x 1/2 (pulse period 10 s) maximum 5 s (pulse period > 10 s)
19 | keysight | b1500a semiconductor device analyzer - data sheet pulse range and pulse parameter1 frequency range 0.1 hz to 33 mhz pulse period programmable range 20 ns to 10 s resolution 10 ns minimum 4 100 ns3 accuracy 1 % (0.01 % + 200 ps) 2 width programmable range 10 ns to (period C 10 ns) resolution 2.5 ns (tr and tf 8 s) 10 ns (tr or tf > 8 s) minimum 4 50 ns (25 ns typical)3 accuracy (3 % + 2 ns) transition time 5 (tr and tf) programmable range 8 ns to 400 ms resolution 2 ns (tr and tf 8 s) 8 ns (tr or tf > 8 s) minimum 4 15 ns 2 (vamp 10 v) 20 ns (vamp 10 v) 30 ns (vamp 20 v) 60 ns (vamp > 20 v) accuracy C5 % to 5 % + 10 ns (vamp 10 v) C5 % to 5 % + 20 ns (vamp 20 v) output relay switching time 6 open/close 100 s 2 1. unless otherwise stated, all specifcations assume a 50 ? termination. 2. supplemental characteristics. 3. this is specifed at vamp 10 v. 4. minimum value in which timing accuracy can be applied. 5. the time from 10 % to 90 % of vamp which is the amplitude of output pulse. 6. solid state relay for frequent switching applications. pulse/dc output voltage and accuracy output voltage (vout) 50 ? load C20 v to +20 v open load C40 v to +40 v accuracy1 open load (0.5 % + 50 mv) amplitude resolution 50 ? load 0.2 mv (|vout|5v) 0.8 mv (5v<|vout|20v) open load 0.4 mv (|vout|10v) 1.6 mv (10v<|vout|40v) output connectors sma source impedance 50 ?2 short circuit current 800 ma peak (400 ma average3) overshoot/ pre-shoot/ringing 4 50 ? load (5 % + 20 mv) 1. at 1 s after completing transition. 2. supplemental characteristics (1 %) 3. this value is specifed under the following condition: [(number of installed hv-spgus) x 0.2 a] + [dc current output by all modules (including hv-sp - gus)] < 3.0 a 4. follow the specifed condition of the transient time. spgu supplemental characteristics pulse width jitter: 0.001 % +150 ps pulse period jitter: 0.001 % +150 ps maximum slew rate: 1000 v/s (50 ? load) noise: 10 mv rms (at dc output) advanced feature: voltage monitor: the hv-spgu has a voltage monitor function to measure the voltage at the dut terminal. measurement accuracy (open load): (0.1 % of reading + 25 mv) measurement resolution: 50 v note: specifed at 1 plc (20 ms = (5 s sample + 5 s interval) x 2000 samples.) voltage compensation: the hv-spgu can measure the impedance of dut and adjust the output voltage according to the dut impedance. alwg (arbitrary linear waveform generator) function arbitrary linear waveform generator (alwg) mode: C output complex waveform per one channel of hv-spgu C defne multi-level pulse and multi-pulse waveform includ - ing open state pulse with alwg gui editor C sequential pulse waveform from user-defned pulse waveform C 1024 points per one channel C programmable timing range: 10 ns to 671.088630 ms, 10 ns resolution pulse waveform t period t width t dela y v amp v peak vbase tr tf 90% 90% 10% 10% defnition of pulse waveform
20 | keysight | b1500a semiconductor device analyzer - data sheet patt ern p1 p4 p3 p7 p8 p9 p6 p5 p2 p10 0 500 ns 15 10 0 example 1. al wg setup table and waveform example 2. al wg complex waveform patt ern 1 patt ern 2 patt ern 2 x 5 pattern 3 example 1. alwg setup table and pattern example 2. alwg complex waveform point time voltage 1 0 0.0 v 2 50 ns 0.0 v 3 70 ns 15.0 v 4 100 ns 15.0 v 5 200 ns 0.0 v 6 300 ns 0.0 v 7 320 ns 10.0 v 8 400 ns 10.0 v 9 450 ns 0.0 v 10 500 ns 0.0 v 16440a smu/pulse generator selector the keysight 16440a smu/pulse generator selector switches ei - ther a smu or pgu to the associated output port. you can expand to four channels by adding an additional 16440a. the pgu port on channel 1 provides a pgu open function, which can discon - nect the pgu by opening a semiconductor relay. the keysight b1500a and 16445a are required to use the 16440a. the following specifcations data is specifed at 23 c 5 c and 50% relative humidity. C channel confguration: 2 channels (ch 1 and ch 2). can add an additional 2 channels (ch 3 and ch 4) by adding another 16440a (selector expande input output channel 1 (ch 1) 2 (smu and pgu 1 ) 1 channel 2 (ch 2) 2 (smu and pgu) 1 channel 3 (ch 3) 2 2 (smu and pgu 1 ) 1 channel 4 (ch 4) 2 2 (smu and pgu) 1 1. pgu channels 1 & 3 have a built-in series semiconductor relay. 2. available when a second 16440a (selector expander) is installed. C voltage and current range input port maximum voltage maximum current smu 200 v 1.0 a pgu 40 v 0.4 a 1 1. this is peak-to-peak current. 16445a smu/pgu selector connection adaptor the keysight 16445a selector adapter is required to control and to supply dc power to the keysight 16440a smu/pulse generator selector. power requirement: 100 to 240 v, 50/60 hz maximum volt-amps (va): 20 va
21 | keysight | b1500a semiconductor device analyzer - data sheet wgfmu (waveform generator/fast measurement unit) module specifcation overview the wgfmu is a self-contained module offering the combination of arbitrary linear waveform generation (alwg) with synchronized fast current or voltage (iv) measure - ment. the alwg function allows you to generate not only dc, but also various types of ac waveforms. in addition to this versatile sourcing capability, the wgfmu can also perform measurement in synchronization with the applied waveform, which enables accurate high-speed iv characterization. measurement mode, function and range wgfmu mode wgfmu function voltage force ranges voltage measurement ranges current measurement ranges source impedance maximum output vf vm im fast iv mode/dc mode y y y -3 v to +3 v -5 v to +5 v -10 v to 0 v 0 v to +10 v 5 v 10 v 1 a, 10 a, 100 a, 1 ma, 10 ma 0 1 +10 v, -10 v, 5 v pg mode y y C -3 v to +3 v -5 v to +5 v 5 v C 50 2 5 v (open load) 2.5 v (50 load) smu pass- through measurement is performed by an smu C C C C 25 v 100 ma vf: voltage force vm: voltage measurement im: current measurement 1. fast iv mode supports active analog feedback loop to keep its output as specifed voltage and the output impedance negligible. it can reduce the infuence of load line effect by the source impedance and dut impedance. 2. 50 (nominal) at dc in pg mode
22 | keysight | b1500a semiconductor device analyzer - data sheet waveform generation and measurement capabilities pulse and any waveform can be generated by using alwg (arbitrary linear waveform generation) vector data. measurements can be performed by measurement events embedded on the vectors. voltage waveform output waveform programming any waveform (including pulse shape) pattern can be programmed by using alwg vector data within maximum number of vectors. minimum timing resolution 10 ns vector length 10 ns to 10,000 s with 10 ns resolution/vector maximum number of vectors 2048 maximum number of sequences 512 maximum number of loop counts 10 12 measurement capabilities measurement (event) measurement can be performed at any specifed points/timing in the waveform by using the mea- surement event feature. this provides the fexibility to perform the measurement only specifc area to reduce the data size and utilize the memory effciently. measurement events can be embedded on any alwg vectors in the waveform with number of measurement points, measurement interval and averaging parameters settings. sampling rate 200msa/s maximum number of measurement points about 4 m data points/channel (typical) interval between measurement points 5 ns, or 10 ns to 1 s with 10 ns resolution averaging per a measurement point 10 ns to 20 ms with 10 ns resolution range change (event) current measurement range can be changed at any specifed points/timing in the waveform by using the range change event feature. it enables to use the user specifed ranges in a measurement sequence accord - ing to the device impedance. trigger capability trigger out (event) output trigger event can be set at any specifed points/timing in the waveform by using the trigger out event feature. wgfmu (waveform generator/fast measurement unit) module specifcation (continued)
23 | keysight | b1500a semiconductor device analyzer - data sheet wgfmu (waveform generator/fast measurement unit) module specifcation (continued) example 1. waveform creation by vector data example 2. measurement event on a created waveform (*) the waveform is created by specifying multiple vectors (time, voltage). each vector can be set within the ranges of vector length and voltage. (*) as well as the measurement event, the range change and trigger event can be specifed in the vector. to perform accurate measurement, it is necessary to take the voltage/current settling time into account from the analog perfor - mance viewpoint. refer to the minimum timing parameters tables as supplemental characteristics of analog performance. voltage 0 ns 10 ns 20 ns time vector #1 vector* vector #2 voltage 0 ns time 10 ns 20 ns 30 ns 40 ns 50 ns 60 ns measurement event* measurement point 1 vector #2 vector #1 vector #3 measurement time (min. 5 ns) measurement interval (min. 5 ns) measurement point 2 measurement point 3
24 | keysight | b1500a semiconductor device analyzer - data sheet force, measurement and timing specifcations voltage force accuracy (0.1% of setting +0.1% of range) 1 resolution 2 96 v (-3 to 3 v range) 160 v (all ranges except for -3 v to 3 v range) overshoot/undershoot (5%+20 mv) 3 noise maximum 0.1 mvrms 4 voltage measurement accuracy (0.1% of reading 0.1% of range) 8 resolution 9 680 v (-5 v to +5 v range) 1.4 mv (-10 v to +10 v range) noise 10 maximum 4 mvrms (-5 v to +5 v range) current measurement accuracy (0.1% of reading 0.2% of range) 8 resolution 9 0.014% of range noise (effective resolution) maximum 0.2% of range 11 timing accuracy rise time t rise (10 to 90%)/ fall time t fall (90 to 10%) -5% to (+5% +10 ns) of setting 5 pulse period 1% of setting 6 pulse width (3% +2 ns) 7 wgfmu (waveform generator/fast measurement unit) module specifcation (continued) 1. independent of the range or the mode. dc constant voltage output. load impedance must be 1 m (1 a range) or 200 k (all other current ranges) for fast iv mode, or 1 m for pg mode. 2. can vary at most 5% based on the result of calibration. 3. pg mode, 50 load, t rise and t fall >16 ns with the 1.5 m cable, >32 ns with 3 m cable, or >56 ns with 5 m cable. 4. theoretical value for observed time 100 ns to 1 ms, supplemental characteristics. 5. pg mode, 50 load, t rise and t fall 24 ns. 6. pg mode, 50 load, pulse period 100 ns. 7. pg mode, 50 load, pulse width 50 ns. 8. independent of the range or the mode. dc constant voltage output. applicable condition: 10,000 averaging samples for 10 a range and above; 100,000 averaging samples for the 1 a range. 9. display resolution. can vary at most 5% based on the result of calibration. 10. 0 v output, open load, no averaging. maximum 1.5 mv rms as supplemental characteristics. 11. effective value at 0 v output, open load, and no averaging. supplemental characteristics. other specifcations number of output channels: 2 channels per module rsu: output connector: sma v monitor terminal: C connector: bnc C source impedance: 50 (nominal) at dc C the terminal outputs a buffered signal equal to 1/10 of v out (into a 50 load) rsu smu path: C leak current: <100 pa (supplemental characteristics) C residual resistance: <300 m (supplemental characteristics)
25 | keysight | b1500a semiconductor device analyzer - data sheet wgfmu to rsu cable length: the wgfmu and rsu are connected by a special composite cable. the following confgurations are available: C 3 m C 5 m C 1.5 m C 2.4 m + connector adapter + 0.6 m C 4.4 m + connector adapter + 0.6 m note: the connector adapter is used when routing the cable through the probers connector panel. trigger output level: ttl trigger width: 10 ns trigger output skew: <3 ns (supplemental characteristics) jitter: <1 ns (supplemental characteristics) skew between channels: <3 ns, under no electrostatic discharge condition (supplemental characteristics). current range change time: <150 s* * the time until the measured current settles within 0.3 % of the fnal result value after the range change (supplemental characteristics). minimum timing parameters for current measurement (supplemental characteristics) 1 voltage applied to dut 10 v current applied to dut 100 na 1 a 10 a 100 a 1 ma 10 ma applied voltage condition recommended minimum pulse width 2 v v v 950 ns 240 ns 145 ns current measurement condition measurement range 1 ma 10 ma recommended minimum measurement window v v v 130 ns 40 ns 20 ns settling time 3 v v v 820 ns 200 ns 125 ns noise (rms) 4 160 pa 425 pa 2.5 na 47 na 280 na 1. measurement conditions: the dut is a resistive load chosen to adjust the fowing current to the specifed current in the table above. the capacitance of the cable between the rsu and the dut is 20 pf. voltage is applied to the dut by a channel of wgfmu/rsu in fast iv mode and in the 10 ma range, and current measurement is performed by another channel at 0 v in fast iv mode. 2. recommended minimum pulse width = settling time + recommended minimum measurement window. 3. the time until the measured value settles to within 0.6 % of the fnal result value after the output voltage is changed from the initial value (0 v). minimum rise/fall time of 70 ns is recommended for minimizing overshoot. 4. rms noise measured over the recommended minimum measurement window.
26 | keysight | b1500a semiconductor device analyzer - data sheet wgfmu software application programming interface (api): instrument library (.dll/.lib for .net) note: instrument library is available for the following programming environments. microsoft visual c++ .net, visual c# .net, visual basic .net, visual basic 6.0, vba, or transera htbasic for windows (release 8.3 or later) application tests C bti (nbti/pbti) C sweep/pulsed sweep measurement (using 2ch of wgfmu in fast iv mode) C pattern editor for general purpose sample application programs following application programs are available on external windows pc. the source code is available for customization. C bti (nbti/pbti) C fast iv sweep C pulsed iv measurement C transient i/v measurement C sampling measurement and rnt data analysis tool wgfmu supported prober vendors C cascade microtech (suss microtec included.) C vector semiconductor 1. measurement conditions: the dut is a resistive load between 1 k and 10 m. the capacitance of the cable between the rsu and the dut is 20 pf. voltage is applied to the dut by a channel of wgfmu/rsu, and voltage measurement is performed by the same channel. (pg mode for 5 v, fast iv mode for 10 v) 2. recommended minimum pulse width = settling time + recommended minimum measurement window. 3. the time until the measured value settles to within 0.6 % of the fnal result value after the output voltage is changed from the initial value (0 v). minimum rise/fall time of 70 ns for 10 v, or 30ns for 5 v is recommended for minimizing overshoot. 4. rms noise measured over the recommended minimum measurement window. minimum timing parameters for voltage measurement (supplemental characteristics) 1 voltage applied to dut 5v 10 v applied voltage condition recommended minimum pulse width 2 105 ns 130 ns voltage measurement condition measurement range 5 v 10 v recommended minimum measurement window 20 ns 20 ns settling time 3 85 ns 110 ns noise (rms) 4 1.4 mv 1.4 mv
27 | keysight | b1500a semiconductor device analyzer - data sheet general specifcations temperature range operating: +5 c to +40 c storage: -20 c to +60 c humidity range operating: 20 % to 70 % rh, non-condensing storage: 10 % to 90 % rh, non-condensing altitude operating: 0 m to 2,000 m (6,561 ft) storage: 0 m to 4,600 m (15,092 ft) power requirement ac voltage: 100-240 v (10 %) line frequency: 50/60 hz maximum volt-amps (va) b1500a: 900 va regulatory compliance emc: iec61326 -1/en61326 -1 as/nzs cispr 11 kc: rra notifcation amending radio waves act article 58-2 safety: iec61010-1/en61010-1 can/csa-c22.2 no. 61010-1-04, c/us certifcation ce, ccsaus, c-tick, kc dimensions b1500a: 420 mm w x 330 mm h x 575 mm d n1301a-100 smu cmu unify unit (scuu): 148 mm w x 75 mm h x 70 mm d n1301a-200 guard switch unit (gswu): 33.2 mm w x 41.5 mm h x 32.8 mm d e5288a atto-sense and switch unit (asu): 132 mm w 88.5 mm h 50 mm d b1531a rsu: 45.2 mm w x 70 mm h x 82 mm d n1255a 2 channel connection box for mcsmu: 184.4 mm w x 61.6 mm h x 169.6 mm d 16440a smu/pgu selector: 250 mm w 50 mm h 275 mm d 16445a selector adaptor: 250 mm w 50 mm h 260 mm d weight b1500a mainframe: 20 kg B1510A hpsmu: 2.0 kg b1511b mpsmu: 1.0 kg b1514a mcsmu: 1.3 kg b1517a hrsmu: 1.2 kg b1520a mfcmu: 1.5 kg b1525a hv-spgu: 1.3 kg b1530a wgfmu: 1.3 kg b1531a rsu: 0.13 kg e5288a asu: 0.5 kg n1301a-100 scuu: 0.8 kg n1301a-200 gswu: 0.1 kg n1255a 2 channel connection box for mcsmu: 0.7 kg 16440a smu/pgu selector: 1.1 kg 16445a selector adapter: 1.0 kg
28 | keysight | b1500a semiconductor device analyzer - data sheet keysight easyexpert group+ software keysight easyexpert group+ gui based characterization software is available either on the b1500as embedded windows 7 platform with 15-inch touch screen or on your pc to accelerate the characterization tasks. it supports effcient and repeatable device characterization in the entire characterization process from measurement setup and execution to analysis and data management either interactive manual operation or automation across a wafer in conjunction with a semiautomatic wafer prober. easyexpert group+ makes it easy to perform complex device characterization immediately with the hundreds of ready-to-use measurements (application tests) furnished, and allows you the option of storing test condition and measurement data automatically after each measurement in a unique built-in database (workspace), ensuring that valuable information is not lost and that measurements can be repeated at a later date. finally, easyexpert has built-in analysis capabilities and a graphical programming environment that facilitate the development of complex testing algorithms. key features - multiple measurement modes for quick setup and measurement execution (application test, classic test, tracer test, quick test and oscilloscope view) C graphical display, automated analysis capabilities and data generation to excel and image for analysis and reporting C built-in database (workspace) records test data automatically and simplifes the data management without numerous data fles C gui-based control of the keysight b2200a, b2201a and e5250a switching matrices C gui-based self-test, self-calibration and diagnostics menu for hardware maintenance C easyexpert remote control function supports the remote measurement execution of application tests that are created on gui interactively, via the lan interface - data back capability and various data protection feature for shared usage by multiple users - characterization environment is available either on mainframe (embedded windows 7) or on users pc as a personal and portable analyzer environment. easyexpert group+ can be installed on any pc as many as needed without additional charge. application library easyexpert comes with over 300 application tests conveniently organized by device type, application, and technology. you can easily edit and customize the furnished appli - cation tests to ft your specifc needs. application tests are provided for the following categories; they are subject to change without notice. device type application tests cmos transistor id-vg, id-vd, vth, breakdown, capacitance, qscv, etc. bipolar transistor ic-vc, diode, gummel plot, breakdown, hfe, capacitance, etc. discrete device id-vg, id-vd, ic-vc, diode, etc. memory vth, capacitance, endurance test, etc. power device pulsed id-vg, pulsed id-vd, breakdown, etc. nano device resistance, id-vg, id-vd, ic-vc, etc. reliability test nbti/pbti, charge pumping, electro migration, hot carrier injection, j-ramp, tddb, etc. and more and more
29 | keysight | b1500a semiconductor device analyzer - data sheet measurement modes and functions operation mode application test mode the application test mode provides application oriented point- and-click test setup and execution. an application test can be se - lected from the library by device type and desired measurement, and then executed after modifying the default input parameters as needed. classic test mode the classic test mode provides function oriented test setup and execution with the same look, feel, and terminology of the 4155/4156 user interface. in addition, it improves the 4155/4156 user interface by taking full advantage of easyexperts gui features. tracer test mode the tracer test mode offers intuitive and interactive sweep control using a rotary knob similar to a curve tracer. just like an analog curve tracer, you can sweep in only one direction (useful for r&d device analysis) or in both directions (useful in failure analysis applications). test set ups created in tracer test mode can be seamlessly and instantaneously transferred to classic test mode for further detailed measurement and analysis. oscilloscope view (available for mcsmu) the oscilloscope view (available in tracer test mode) displays measured mcsmu module current or voltage data versus time. the pulsed measurement waveforms appear in a separate window for easy verifcation of the measurement timings. this function is useful for verifying waveform timings and debugging pulsed measurements. it is available when a tracer test has one or more mcsmu channels being used in pulsed mode. the oscilloscope view can display the pulsed waveform timings at any (user speci - fed) sweep step of the sweep output. sampling interval: 2 s sampling points: 2000 sa sampling duration: 22 s to 24 ms marker function: read-out for each data channel resolution: 2s data saving: numeric: text/csv/xmlss image: emf/bmp/jpg/png quick test mode a gui-based quick test mode enables you to perform test se - quencing without programming. you can select, copy, rearrange and cut-and-paste any application tests with a few simple mouse clicks. once you have selected and arranged your tests, simply click on the measurement button to begin running an automated test sequence. measurement modes the keysight b1500a supports the following measurement modes: iv measurement C spot C staircase sweep C pulsed spot C pulsed sweep C staircase sweep with pulsed bias C sampling C multi-channel sweep C multi-channel pulsed sweep C list sweep C linear search 1 C binary search 1 c measurement C spot c C cv (dc bias) sweep C pulsed spot c C pulsed sweep cv C c-t sampling C c-f sweep C cv (ac level) sweep C quasi-static cv (qscv) 1. they are supported by flex command only. sweep measurement number of steps: 1 to 10001 (smu), 1 to 1001 (cmu) sweep mode: linear or logarithmic (log) sweep direction: single or double sweep hold time: 0 to 655.35 s, 10 ms resolution delay time: 0 to 65.535 s, 100 s resolution 0 to 655.35 s, 100 s resolution (cv (ac level) sweep, c-f sweep) step delay time: 0 to 1 s, 100 s resolution step output trigger delay time: 0 to (delay time) s, 100 s resolution step measurement trigger delay time: 0 to 65.535 s, 100 s resolution sampling (time domain) measurement displays the time sampled voltage/current data (by smu) versus time. sampling channels: up to 10 sampling mode: linear, logarithmic (log) sampling points: for linear sampling: 1 to 100,001/(number of channels) for log sampling: 1 to 1+ (number of data for 11 decades) sampling interval range: 100 s +20 s x (num. of channels C 1) to 2 ms, 10 s resolution 2 ms to 65.535 s, 1 ms resolution * sampling interval less than 2ms is only supported in linear mode. hold time, bias hold time: -90 ms to -100 s, 100 s resolution 0 to 655.35 s, 10 ms resolution measurement time resolution: 100 s
30 | keysight | b1500a semiconductor device analyzer - data sheet other measurement characteristics measurement control single, repeat, append, and stop smu setting capabilities limited auto ranging, voltage/current compliance, power compli - ance, automatic sweep abort functions, self-test, and self-cali - bration standby mode smus in standby remain programmed to their specifed output value even as other units are reset for the next measurement. bias hold function this function allows you to keep a source active between mea - surements. the source module will apply the specifed bias between measurements when running classic tests inside an application test, in quick test mode, or during a repeated mea - surement. the function ceases as soon as these conditions end or when a measurement that does not use this function is started. current offset cancel this function subtracts the offset current from the current mea - surement raw data, and returns the result as the measurement data. this function is used to compensate the error factor (offset current) caused by the measurement path such as the measure - ment cables, manipulators, or probe card. time stamp the b1500a supports a time stamp function utilizing an internal quartz clock. resolution: 100 s data display, analysis and arithmetic functions data display x-y graph plot x-axis and up to eight y-axes, linear and log scale, real time graph plotting. scale: auto scale and zoom marker: marker to min/max, interpolation, direct marker, and marker skip cursor: direct cursor line: two lines, normal mode, grad mode, tangent mode, and regression mode overlay graph comparison: graphical plots can be overlaid. list display measurement data and calculated user function data are listed in conjunction with sweep step number or time domain sampling step number. up to 20 data sets can be displayed. data variable display up to 20 user-defned parameters can be displayed on the graph - ics screen. automatic analysis function on a graphics plot, the markers and lines can be automatically located using the auto analysis setup. parameters can be auto - matically determined using automatic analysis, user function, and read out functions. analysis functions up to 20 user-defned analysis functions can be defned using arithmetic expressions. measured data, pre-defned variables, and read out functions can be used in the computation, and the result can be displayed. read out functions the read out functions are built-in functions for reading various values related to the marker, cursor, or line. data export x-y graph plot can be printed or stored as image data to clipboard or mass storage device. (file type: bmp, gif, png, emf). graph and list data can be exported to excel.
31 | keysight | b1500a semiconductor device analyzer - data sheet arithmetic functions user functions up to 20 user-defned functions can be defned using arithmetic expressions. measured data and pre-defned variables can be used in the computation. the results can be displayed on the lcd. arithmetic operators +, -, *, /, ^, abs (absolute value), at (arc tangent), avg (averaging), cond (conditional evaluation), delta, diff (differential), exp (expo - nent), integ (integration), lgt (logarithm, base 10), log (logarithm, base e), mavg (moving average), max,min, sqrt, trigonometric function, inverse trigonometric function, and so on. physical constants keyboard constants are stored in memory as follows: q: electron charge, 1.602177e-19 c k: boltzmans constant, 1.380658e-23 e (e): dielectric constant of vacuum, 8.85 4188e-12 engineering units the following unit symbols are also available on the keyboard: a (10-18), f (10-15), p (10-12), n (10-9), u or (10-6), m (10-3), k (103), m (106), g (109), t (1012) , p (1015) data management workspace (built-in database) C easyexpert group+ supports the built-in database called workspace. workspaces are created on a hdd, and they enable to manage and access all the measurement related data without handling numerous fles. every workspace supports the following features: C access to measurement capabilities and data stored in the workspace. C save/import/export measurement settings and data (application library, measurement settings, my favorite setup, and measurement data) C recall the setup for measurement reproduction and data for analysis data auto record/auto export easyexpert group+ has the ability to automatically store the measurement setup and data within a workspace. it can also export measurement data in real time, in a variety of formats such as excel (xls). import/export fles file type: keysight easyexpert format, xml-ss format, csv format data protection easyexpert group+ has various options to protect important data as follows. C password protection (workspace, test defnition and my favorite) C user level access control (engineer mode/operator mode) workspace back-up and portability easyexpert group+ has the ability to import/export a workspace for back-up and portability.
32 | keysight | b1500a semiconductor device analyzer - data sheet easyexpert group+ supported instruments and prerequisites supported instruments and features precision current - voltage analyzer series discontinued advanced device analyzer precision iv analyzer economic iv analyzer b1500a b1505a e5270b e5262/63a e5260a b2900a series smu 4155b/c 4156b/c classic test i/v sweep yes yes yes yes yes yes 1 multi-ch i/v sweep yes yes yes yes yes - i/v list sweep yes yes yes yes yes - i/v-t sampling yes yes - - yes yes c-v sweep yes yes - - - - spgu control yes - - - - - gui based switching matrix control yes 2 - yes 2 yes 2 yes 2 yes 2 direct control yes yes - - - - application test yes yes yes yes yes yes tracer test yes (dc/pulse) yes (dc/pulse) yes (dc) yes (dc) yes (dc/pulse) - quick test yes yes yes yes yes yes oscilloscope view yes 3 yes 3 - - - - external instrument driver support lcr meter (4284a/e4980a) yes yes yes yes yes yes pulse generator (81110a) yes yes yes yes yes yes dvm (3458a) yes yes yes yes yes yes prober control in quick test mode yes 4 yes 4 yes 4 yes 4 yes 4 yes 4 firmware requirement a.04.00 or later 5 a.04.00 or later 5 b.01.10 or later b.01.10 or later 1.0 or later hostc: 03.08 or later smuc: 04.08 or later 1. pgu and vsu/vmu are supported. differential voltage measurement of vmu is not supported. 2. b2200/01a and e5250a (with e5252a cards) are supported 3. only available for supported modules. 4. cascade microtech sumit 12000/s300 (nucleus), cascade microtech (suss microtec) pa200/pa300, and vector semiconductor vx-2000/vx-3000 5. the latest frmware version is strongly recommended to take full advantage of measurement capabilities.
33 | keysight | b1500a semiconductor device analyzer - data sheet recommended gpib i/f interface b1500a 4155b/c 4156b/c keysight 82350b/c pci 1 82351b pcie 1 82357a /b usb 2 national instruments gpib-usb-hs usb 2 1. a pci or pcie card is highly recommended because of stability and speed. 2. usb gpib interfaces might cause serial poll error intermittently due to the intrinsic communication scheme differences. it is reported that using an even gpib address sometimes signifcantly decreases the chance of the error. the ni gpib-usb-hs is recommended for stability, and the keysight 82357x is recommended for speed. prerequisites operating system and service pack microsoft windows vista business sp2 or later (32bit) microsoft windows 7 professional sp1 or later (32bit/64bit) microsoft windows 8.1 professional or later (32bit/64bit) microsoft windows 10 pro or later (32bit/64bit) processor vista certifed pc windows 7 certifed pc windows 8.1 certifed pc windows 10 certifed pc supported language english (us) english (us) english (us) english (us) memory 2 gb memory 2 gb memory 2 gb memory 2 gb memory display xga 1024 x 768 (sxga 1280 x 1024 recommended) xga 1024 x 768 (sxga 1280 x 1024 recommended) xga 1024 x 768 (sxga 1280 x 1024 recommended) xga 1024 x 768 (sxga 1280 x 1024 recommended) hdd installation: 1gb free disk space on the c drive installation: 1gb free disk space on the c drive installation: 1gb free disk space on the c drive installation: 1gb free disk space on the c drive test setup / result data storage: free disk space more than 30gb is recommended test setup / result data storage: free disk space more than 30gb is recommended test setup / result data storage: free disk space more than 30gb is recommended test setup / result data storage: free disk space more than 30gb is recommended .net framework microsoft .net framework 3.5 sp1 microsoft .net framework 3.5 sp1 microsoft .net framework 3.5 sp1 microsoft .net framework 3.5 sp1 io libraries keysight io libraries suite 16.2, 16.3, 17.1 update 1 or later (for the online execution mode) keysight io libraries suite 16.2, 16.3, 17.1 update 1 or later (for the online execution mode) keysight io libraries suite 16.2, 16.3, 17.1 update 1 or later (for the online execution mode) keysight io libraries suite 17.1 update 1 or later (for the online execution mode) prerequisites to use the easyexpert, wgfmu instrument library and other furnished software on an external pc are as follows.
34 | keysight | b1500a semiconductor device analyzer - data sheet other accessories n1301a cmu accessories for b1500 n1301a-10 0 smu cmu unify unit (scuu) n1301a-102 smu cmu unify unit cable (3m) n1301a-110 smu cmu unify unit magnetic stand n1301a-200 guard switch unit (gswu) n1301a-201 guard switch unit cable (1 m) n1301a-202 guard switch unit cable (3 m) b1542a pulse iv package for b1500 / easyexpert order information mainframe b1500a semiconductor device analyzer mainframe the following accessories are included 16444a-001 keyboard 16444a-002 usb mouse 16444a-003 stylus pen 16493j-001/002 interlock cable 1.5m or 3.0m* 16493l-001/002 gndu cable 1.5m or 3.0m * 16494a-001/002 tri-axial cable 1.5m or 3.0m * n1254a-100 gndu to kelvin adaptor cd-roms manuals, others *select b1500a-015 or b1500a-030 to specify cable length b1500a-015 1.5m cable (cable length is set to 1.5m for standard and add-on packages) b1500a-030 3.0m cable (cable length is set to 3.0m for standard and add-on packages) b1500a-050 50 hz line frequency b1500a-060 60 hz line frequency b1500a-a6j* ansi z540 compliant calibration b1500a-uk6* commercial calibration certifcate with test data b1500a-aba english paper document b1500a-abj japanese paper document standard packages b1500a-a00 empty package for custom solution b1500a-a01 standard package (mpsmu 4ea. & cables) b1500a-a02 high resolution package (hrsmu 4ea & cables) b1500a-a03 high power package (hpsmu 2ea, mpsmu 2ea & cables) b1500a-a04 basic flash memory cell package (mpsmu 2ea, hrsmu 2ea, spgu, accessories) add-on packages b1500a-a10 hpsmu add-on (hpsmu 1ea. & cables) b1500a-a11 mpsmu add-on (mpsmu 1ea. & cables) b1500a-a17 hrsmu add-on (hrsmu 1ea. & cables) b1500a-a1a mcsmu add-on (mcsmu 1ea. connection box & cables) b1500a-a1b mcsmu add-on (mcsmu 2ea. connection box & cables) b1500a-a20 mfcmu add-on (mfcmu, cable) b1500a-a25 hvspgu add-on (hvspgu 1ea. & cables) b1500a-a28 asu (atto sense unit) add-on for hrsmu (asu 1ea. & cables) b1500a-a29 asu (atto-sense and switch unit) add-on for mpsmu (asu 1ea. & cables) b1500a-a30 wgfmu add-on (wgfmu 1ea. rsu 2ea. & cables) b1500a-a31 wgfmu add-on with connector adapter (wgfmu 1ea, rsu 2ea, cables & connector adapter) b1500a-a3p wgfmu probe cable kit (8 probe cables. wgfmu is not included.) b1500a-a5f test fxture for packaged device measurement (16442b 1ea) * the option a6j and uk6 are available only at the initial shipment. C option a6j includes the test data and measurement uncertainties from the calibration and the certifcate of calibration stating the instrument has been calibrated using a process in compliance with ansi z540 and is operating within the published specifcations. C option uk6 includes the test data from the calibration and the certifcate of calibration stating the instrument has been calibrated and is operating within the published specifcations.
35 | keysight | b1500a semiconductor device analyzer - data sheet package option contents 1 standard packages item description qty b1500a-a01 standard package b1511b mpsmu (medium power smu) 4 16494a-001/002 triaxial cable 1.5m or 3.0m 8 b1500a-a02 high resolution package b1517a hrsmu (high resolution smu) 4 16494a-001/002 triaxial cable 1.5m or 3.0m 8 b1500a-a03 high power package b1511b mpsmu (medium power smu) 2 B1510A hpsmu (high power smu) 2 16494a-001/002 triaxial cable 1.5m or 3.0m 8 b1500a-a04 basic fash memory cell package b1511b mpsmu (medium power smu) 2 b1517a hrsmu (high resolution smu) 2 b1525a hvspgu (pulse generator unit) 1 16493p-001 / 002 spgu cable (sma-to-coaxial) 1.5m or 3.0m 2 16440a smu/pgu pulse selector 1 16440a-003 control cable 40cm (2nd selector) 1 16445a selector connection unit 1 16445a-001 control cable for b1500a to 16440a 1.5m 1 16494a-001 tri-axial cable 1.5m 2 16494a-001/002 triaxial cable 1.5m or 3.0m 8 item description qty b1500a-a20 mfcmu add-on package b1520a mfcmu 1 n1300a-001/002 cmu cable for b1500a 1.5m or 3.0m 1 b1500a-a25 hvspgu add-on package b1525a hvspgu 1 16493p-001/002 spgu cable (sma to coaxial) 1.5m or 3.0m 2 b1500a-a28/a29 asu add-on package e5288a asu (atto-sense and switch unit) 1 e5288a-001/002 triaxial and dsub cable for asu 1.5m or 3.0m 1 b1500a-a30 wgfmu add-on package 2 b1530a one wgfmu and two rsus 1 b1530a-005/002 two wgfmu cables (1.5m or 3.0m) to connect between wgfmu and rsu 1 b1500a-a31 wgfmu add-on package with connection adapter 2 b1530a one wgfmu and two rsus 1 b1530a-001 two set of wgfmu cables (0.6m + 2.4m) 1 16493r-801 wgfmu connector adapter 2 b1500a-a3p wgfmu probe cable kit 16 493r-101 ssmc-ssmc cable (50mm) for current return path 2 16 493r-102 ssmc-ssmc cable (70mm) for current return path 2 16493r-202 sma-ssmc cable (200mm) between rsu and dc probe 2 16493r-302 sma-sma cable (200mm) between rsu and rf probe 2 b1500a-a5f test fxture for packaged device measurement 16442b test fxture test fxture adapter universal socket module 28 pin dip socket module blank ptfe board cables used in test fxture adapter carrying case 1 1 2 1 1 39 1 add-on packages 1. cable length is set by b1500a-015 or b1500a-030 option 2. order 16493r-802 if magnet stand is necessary for rsu b1500a-a10 hpsmu add-on package B1510A hpsmu (high power smu) 1 16494a-001/002 triaxial cable 1.5m or 3.0m 2 b1500a-a11 mpsmu add-on package b1511b mpsmu (medium power smu) 1 16494a-001/002 triaxial cable 1.5m or 3.0m 2 b1500a-a17 hrsmu add-on package b1517a hrsmu (high resolution smu) 1 16494a-001/002 triaxial cable 1.5m or 3.0m 2 b1500a-a1a mcsmu add-on package b1514a mcsmu (medium current smu) 1 16494a-001/002 triaxial cable 1.5m or 3.0m 2 n1255a 2 channel connection box for mcsmu 1 b1500a-a1b mcsmu add-on package b1514a mcsmu (medium current smu) 2 16494a-001/002 triaxial cable 1.5m or 3.0m 4 n1255a 2 channel connection box for mcsmu 1
36 | keysight | b1500a semiconductor device analyzer - data sheet this information is subject to change without notice. ? keysight technologies, 2013 C 2016 published in usa, february 25, 2016 5989-2785en www.keysight.com mykeysight www.keysight.com/find/mykeysight a personalized view into the information most relevant to you. three-year warranty www.keysight.com/find/threeyearwarranty keysights committed to superior product quality and lower total cost of ownership. keysight is the only test and measurement company with a three-year warranty standard on all instruments, worldwide. and, we provide a one-year warranty on many accessories, calibration devices, systems and custom products. keysight assurance plans www.keysight.com/find/assuranceplans up to ten years of protection and no budgetary surprises to ensure your instruments are operating to specification, so you can rely on accurate measurements. www.keysight.com/find/b1500a keysight precision current-voltage analyzer series and power device analyzer series www.keysight.com/find/analyzer from hewlett-packard through agilent to keysight for more than 75 years, weve been helping you unlock measurement insights. our unique combination of hardware, software and people can help you reach your next breakthrough. unlocking measurement insights since 1939. 1939 the future for more information on keysight technologies products, applications or services, please contact your local keysight office. the complete list is available at: www.keysight.com/find/contactus americas canada (877) 894 4414 brazil 55 11 3351 7010 mexico 001 800 254 2440 united states (800) 829 4444 asia pacifc australia 1 800 629 485 china 800 810 0189 hong kong 800 938 693 india 1 800 11 2626 japan 0120 (421) 345 korea 080 769 0800 malaysia 1 800 888 848 singapore 1 800 375 8100 taiwan 0800 047 866 other ap countries (65) 6375 8100 europe & middle east austria 0800 001122 belgium 0800 58580 finland 0800 523252 france 0805 980333 germany 0800 6270999 ireland 1800 832700 israel 1 809 343051 italy 800 599100 luxembourg +32 800 58580 netherlands 0800 0233200 russia 8800 5009286 spain 800 000154 sweden 0200 882255 switzerland 0800 805353 opt. 1 (de) opt. 2 (fr) opt. 3 (it) united kingdom 0800 0260637 for other unlisted countries: www.keysight.com/find/contactus (bp- 02-10-16) dekra certified iso9001 quality management system www.keysight.com/go/quality keysight technologies, inc. dekra certified iso 9001:2015 quality management system

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